Katsuichi Kitagawa
Abstract
Two major shortcomings in white-light interferometric surface measurement are 1) slow measurement speed, and 2) error caused by a transparent film on the surface. This paper introduces new developments to solve these problems.
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Two major shortcomings in white-light interferometric surface measurement are 1) slow measurement speed, and 2) error caused by a transparent film on the surface. This paper introduces new developments to solve these problems.
Key concepts: White light interferometry, Interferometry, White light, Profiling (computer programming), Optics, Computer science, Materials science, Physics