2008•Microsystem TechnologiesRequires access

Fabricating HARMS by using megasonic assisted electroforming

Gang Liu, Xinlong Huang, Ying Xiong, Yangchao Tian

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Key concepts: Electroforming, Electroplating, Materials science, Mass transport, Fabrication, Microelectromechanical systems, Resist, Ultrasonic sensor

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Fabricating HARMS by using megasonic assisted electroforming — Research Paper | ScholarLens