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Feasibility of regenerating etching acids as part of the metal-etching process

P. Vanya, K. Mets

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Key concepts: Etching (microfabrication), Acid etching, Reactive-ion etching, Hydrochloric acid, Process (computing), Materials science, Metal, Regeneration (biology)

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Feasibility of regenerating etching acids as part of the metal-etching process — Research Paper | ScholarLens