1992•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access

Noncontact measuring methods of optical surface roughness

Feng‐Xia Liang, Tianning Cao

Abstract

This paper discusses some non-contact measuring methods of optical surface roughness. Three types of optical interference profilometers researched in China are mentioned. Some unique techniques used in them are introduced. The advantages and disadvantages of them for on-line measuring are discussed.

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Available abstract

Key concepts: Profilometer, Surface roughness, Surface finish, Interference (communication), Optics, Materials science, Line (geometry), Computer science