2008•Materials science forumOpen access

Characterization of Electric Discharge Machining for Silicon Carbide Single Crystal

Tomohisa Kato, Toshiya Noro, Hideaki Takahashi, Satarou Yamaguchi, Kazuo Arai

Abstract

In this study, we report electric discharge machining (EDM) as a new cutting method for silicon carbide (SiC) single crystals. Moreover, we discuss characteristics and usefulness of the EDM for the SiC. The EDM realized not only high speed and smooth cutting but also lower surface damage. Defect propagation in the EDM SiCs have been also estimated by etch pits observation using molten KOH, however, we confirmed the EDM has caused no damage inside the SiCs in spite of high voltage and high temperature during the machining.

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Key concepts: Materials science, Silicon carbide, Machining, Electrical discharge machining, Carbide, Characterization (materials science), Metallurgy, Crystal (programming language)