1996•Surface and Coatings TechnologyRequires access

Comparison of the structure of PVD-thin films deposited with different deposition energies

E. Lugscheider, C. Barimani, Christian Wolff, S. Guerreiro, G. Doepper

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Key concepts: Materials science, Thin film, Deposition (geology), Physical vapor deposition, Evaporation, Electron beam physical vapor deposition, Ion plating, Sputter deposition

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