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Development of MEVVA ion source

Sun Biehe, Hu Shangbin, Chen Qin, Shui Yongqin

Open publisher page 6 citations

Abstract

Research results of the metal vapor vacuum arc (MEVVA) ion source are reported in this paper. As cathode materials, for example, Al, Ti, Fe, and Cu are used, respectively. A triggering pulse with a pulse height of 12 kV, pulse length of 90 μs, and repetition rate of 1–5 pulses/s is applied between the trigger electrode and the cathode. The pulse duration of the extracted ion beam is 800 μs. When the extraction voltage is 28 kV, the extracted beam current intensity for Al, Ti, Fe, and Cu is 255, 290, 240, and 300 mA, respectively.

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What this paper is about

Research results of the metal vapor vacuum arc (MEVVA) ion source are reported in this paper. As cathode materials, for example, Al, Ti, Fe, and Cu are used, respectively. A triggering pulse with a pulse height of 12 kV, pulse length of 90 μs, and repetition rate of 1–5 pulses/s is applied between the trigger electrode and the cathode. The pulse duration of the extracted ion beam is 800 μs. When the extraction voltage is 28 kV, the extracted beam current intensity for Al, Ti, Fe, and Cu is 255, 290, 240, and 300 mA, respectively.

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OpenAlex reports 6 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

Research results of the metal vapor vacuum arc (MEVVA) ion source are reported in this paper. As cathode materials, for example, Al, Ti, Fe, and Cu are used, respectively. A triggering pulse with a pulse height of 12 kV, pulse length of 90 μs, and repetition rate of 1–5 pulses/s is applied between the trigger electrode and the cathode. The pulse duration of the extracted ion beam is 800 μs. When the extraction voltage is 28 kV, the extracted beam current intensity for Al, Ti, Fe, and Cu is 255, 290, 240, and 300 mA, respectively.

Key concepts: Vacuum arc, Materials science, Cathode, Ion source, Pulse (music), Pulse duration, Electrode, Electric arc

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