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2003•Sensors and Actuators A PhysicalRequires access

Simulation, fabrication and testing of bulk micromachined 6H-SiC high-g piezoresistive accelerometers

A R Atwell, Robert S. Okojie, Kevin Kornegay, S. L. Roberson, Alain Béliveau

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Key concepts: Accelerometer, Piezoresistive effect, Materials science, Fabrication, Benchmark (surveying), Shock (circulatory), Ranging, Acoustics

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