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Preparation of Boron Nitride Thin Films by Chemical Vapor Deposition

Katsumitsu Nakamura

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Key concepts: Materials science, Boron nitride, Chemical vapor deposition, Thin film, Combustion chemical vapor deposition, Chemical engineering, Nitride, Boron

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Preparation of Boron Nitride Thin Films by Chemical Vapor Deposition — Research Paper | ScholarLens