SiC thin-film thermistor

A thermistor using a sputtered SiC film has been developed as a temperature-sensing device which is able to detect temperatures accurately over the wide range of 30-300 degrees C. The thermistor has a unique characteristic in that the B constant increases linearly with an increase of temperature. The typical values of the B constant increase from 1950K at 50 degrees C to 3080K at 250 degrees C. From this unique characteristic, the temperature dependence of resistance was calculated with high accuracy by an experimental equation. The thermistor consists of a thermistor element and a package. The thermistor element comprises the SiC film temperature sensor. The package comprises a small glass tube in which the thermistor element is sealed hermetically. The characteristics of the thermistor are very stable for long periods under various test conditions.