1984•IEEE Electron Device LettersRequires access
The vertical hall-effect device
R.S. Popović
Open publisher page 185 citations
Abstract
A novel device, sensitive to the magnetic field parallel to the chip surface is described. The device has a form remeniscent of a semi circular plate placed perpendicularly to the chip plane. The operation principle is that of the conventional Hall-effect device. The unusual geometry principally does not affect sensitivity. The experimental samples are fabricated using a standard bulk CMOS technology, where the p-well deep diffusion is used to surround the active device volume. Sensitivity up to 450 V/AT is measured.