1994•Japanese Journal of Applied PhysicsRequires access
High-Resolution Temperature Measurement Using Phase-Compensating Interferometer and Frequency-Monitoring Interferometer
Fumio Murakami, Taketoshi Nakano, Tatehisa Ohta, Takumi Ichinose
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Abstract
A noncontact interferometric thermometry method based on phase-compensating interferometry is described. Direct frequency monitoring by the reference interferometer connected in parallel to the sensing interferometer provides temperature measurement of high accuracy.