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2004•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access

Simulations on laser ablation and its applications

Hiroyuki Furukawa, Tohru Kawamura, Atsushi Sunahara, Takeshi Nishikawa, Katsunobu Nishihara, Chiyoe Yamanaka

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Abstract

Integrated laser ablation simulation code includes phase transition from liquid to neutral gas to partially ionized plasma, detail laser absorption processes, equation of state, hydrodynamics, and radiation transport, is developed to describe ablation phenomena with phase transition and properties of emission plasmas. For an application of this simulation code, we perform simulations on optimization of laser produced plasmas for extreme ultra violet (EUV) light sources. Because of very low laser intensities (from 1010 W/cm2 to 1011 W/cm2) compared with that in laser fusion cases, it is necessary to include phase transition effects into ablation radiation hydrodynamics code.

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What this paper is about

Integrated laser ablation simulation code includes phase transition from liquid to neutral gas to partially ionized plasma, detail laser absorption processes, equation of state, hydrodynamics, and radiation transport, is developed to describe ablation phenomena with phase transition and properties of emission plasmas. For an application of this simulation code, we perform simulations on optimization of laser produced plasmas for extreme ultra violet (EUV) light sources. Because of very low laser intensities (from 1010 W/cm2 to 1011 W/cm2) compared with that in laser fusion cases, it is necessary to include phase transition effects into ablation radiation hydrodynamics code.

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OpenAlex reports 3 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

Integrated laser ablation simulation code includes phase transition from liquid to neutral gas to partially ionized plasma, detail laser absorption processes, equation of state, hydrodynamics, and radiation transport, is developed to describe ablation phenomena with phase transition and properties of emission plasmas. For an application of this simulation code, we perform simulations on optimization of laser produced plasmas for extreme ultra violet (EUV) light sources. Because of very low laser intensities (from 1010 W/cm2 to 1011 W/cm2) compared with that in laser fusion cases, it is necessary to include phase transition effects into ablation radiation hydrodynamics code.

Key concepts: Plasma, Laser, Ablation, Laser ablation, Extreme ultraviolet lithography, Radiation, Ionization, Absorption (acoustics)

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