2011•Lab on a ChipRequires access

Lithographic patterning on polydimethylsiloxane surfaces using polydimethylglutarimide

Roger M. Diebold, David R. Clarke

Abstract

We present a method for high fidelity lithographic patterning on polydimethylsiloxane (PDMS) surfaces employing traditional cleanroom equipment and commercially available materials that overcomes previous problems in PDMS processing. To illustrate this method, an electrostatically actuated microfluidic pump and rectangular diffraction gratings were fabricated on PDMS.

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Available abstract

Key concepts: Polydimethylsiloxane, Cleanroom, Lithography, Soft lithography, Materials science, Microfluidics, PDMS stamp, Nanotechnology