Development and Characteristics of the x-ray transmission anode tube for the thickness measurement of film

수십에서 수백 ${\mu}m$ 영역의 필름 두께 측정에 적용하기 위한 Ag-target 투과양극형 x-ray tube를 개발하고 특성을 조사하였다. 10kV 부근의 관전압에서 x-ray 에너지의 분포 및 선량특성을 조사하고 W-target tube와 비교하여 논의하였다. 또한 Ag-target tube와 W-target tube를 이용하여 Ny film과 PP film의 두께변화에 따른 x-ray의 투과 특성으로 조사하였고, 그 결과 개발된 x-ray tube는 필름두께 측정용으로 적용할 수 있을 만큼 충분히 좋은 특성을 나타내었다. The x-ray transmission anode Ag-target tube was developed to apply for the thickness measurement of film in the thickness range of several tens $\sim$ several hundreds ${\mu}m$ and its characteristics were evaluated. The energy distribution and dose of x-ray from Ag-target tube was investigated at the tube voltage near 10 kV, and discussed in comparition with that from W-target tube. The energy distribution and dose of x-rays passing through film were measured with various thickness of Ny and PP film. From these results, it was confirmed that our x-ray tube can be applied for the thickness measurement of film.