Hard X-ray Microprobe and Scanning Microscopy with Spherical-Aberration-Corrected Grazing-Incident Spherical-Concave Mirror Optics

Total-reflection mirror optics with four spherical-concave mirrors has been developed for hard X-ray microfocusing. The optical system consists of a pair of tandem spherical-concave mirrors. Each tandem-mirror system is assembled to eliminate spherical aberration of gazing-incident optics with spherical mirrors, and the two tandem-mirror systems are combined in a crossed-mirror geometry in order to achieve two-dimensional focusing. Characterization of the quad-mirror system as an X-ray focusing device was performed at beamline 20XU of SPring-8. The focused beam size at an X-ray energy of 10 keV was measured to be 170×190 nm2 in full-width at half-maximum, and the X-ray energy dependence of focusing properties was evaluated in the energy range from 8 to 14 keV. Preliminary experiments on scanning microscopy were also carried out.