2012•Surface and Coatings TechnologyRequires access

Modeling of electron temperature and DC bias voltage in an inductively-coupled Cl 2 /Ar plasma using neural network

Moonkeun Kim, Hanbyeol Jang, Yong‐Hwa Lee, Kwang‐Ho Kwon, Kang-Bak Park

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Key concepts: Langmuir probe, Inductively coupled plasma, Electron temperature, Plasma, Materials science, Plasma parameters, Artificial neural network, Voltage

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Modeling of electron temperature and DC bias voltage in an inductively-coupled Cl 2 /Ar plasma using neural network — Research Paper | ScholarLens