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2008•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsRequires access

Correlation between ion beam parameters and physical characteristics of nanostructures fabricated by focused ion beam

Sarvesh K. Tripathi, Neeraj Shukla, V. N. Kulkarni

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Key concepts: Focused ion beam, Ion, Materials science, Ion beam deposition, Ion beam, Fluence, Whisker, Ion beam mixing

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