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1965•Journal of Vacuum Science and TechnologyRequires access

Residual-Gas Analysis of a DC-705 Oil-Diffusion-Pumped uhv System

C. M. Gosselin, Paul J. Bryant

Open publisher page 5 citations

Abstract

The residual gases present in a DC-705 oil-diffusion-pump uhv system have been determined as a function of various trapping conditions. The system was equipped with a metal 2-in. oil-diffusion pump in series with a specially designed trap in which zeolite was used. The configuration of the trap permitted the trapping zone to be immersed in cryogenic liquids, e.g., LN2. The effectiveness of the trap was determined as a function of temperature. A comparison of the residual gases is made for six conditions, including three trapping temperatures, while operating with zeolite and without zeolite.

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What this paper is about

The residual gases present in a DC-705 oil-diffusion-pump uhv system have been determined as a function of various trapping conditions. The system was equipped with a metal 2-in. oil-diffusion pump in series with a specially designed trap in which zeolite was used. The configuration of the trap permitted the trapping zone to be immersed in cryogenic liquids, e.g., LN2. The effectiveness of the trap was determined as a function of temperature. A comparison of the residual gases is made for six conditions, including three trapping temperatures, while operating with zeolite and without zeolite.

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Available abstract

The residual gases present in a DC-705 oil-diffusion-pump uhv system have been determined as a function of various trapping conditions. The system was equipped with a metal 2-in. oil-diffusion pump in series with a specially designed trap in which zeolite was used. The configuration of the trap permitted the trapping zone to be immersed in cryogenic liquids, e.g., LN2. The effectiveness of the trap was determined as a function of temperature. A comparison of the residual gases is made for six conditions, including three trapping temperatures, while operating with zeolite and without zeolite.

Key concepts: Trapping, Trap (plumbing), Zeolite, Diffusion, Residual, Residual gas analyzer, Materials science, Analytical Chemistry (journal)

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