1972•Review of Scientific InstrumentsRequires access
The Design and Performance of a High-Speed Economical Ultrahigh Vacuum Chamber Utilizing Titanium Sublimation
L. Y. L. Shen
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Abstract
The pumping action produced by evaporating titanium onto very large surfaces held between 78 and 300 K has been studied inside a 60 liter steel tank. The present design offers high pumping speed at pressures below 10−9 Torr. The partial pressures of different residual gases under operational conditions were measured with a mass spectrometer. The partial pressures of several gases are reported as a function of temperature.