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1999•Metallurgical and Materials Transactions ARequires access

Rapid epitaxial growth of conducting and insulating III-V compounds on (001), (110), (111)A, (311)A, and (311)B surfaces by hydride vapor phase epitaxy

S. Lourdudoss, N. Gopalakrishnan, Richard C. Holz, M. Deschler, R. Beccard

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Key concepts: Epitaxy, Vapor phase, Hydride, Materials science, Electrical resistivity and conductivity, Phase (matter), Optoelectronics, Growth rate

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Rapid epitaxial growth of conducting and insulating III-V compounds on (001), (110), (111)A, (311)A, and (311)B surfaces by hydride vapor phase epitaxy — Research Paper | ScholarLens