1996•Surface and Coatings TechnologyRequires access

Vacuum arc deposition of thin films from an LaB6 cathode

S. Schmidbauer, H. Klose, Andreas Ehrlich, M. Friedrich, Manuel Röder, Frank Richter

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Key concepts: Materials science, Crystallite, X-ray photoelectron spectroscopy, Cathodic arc deposition, Thin film, Cathode, Analytical Chemistry (journal), Evaporation

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