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Ellipsometry and Polarized Light

R. M. A. Azzam, N. M. Bashara, Stanley S. Ballard

Abstract

Preface. 1. The polarization of light waves. 2. Propagation of polarized light through polarizing optical systems. 3. Theory and analysis of measurements in ellipsometer systems. 4. Reflection and transmission of polarized light by stratified planar structures. 5. Instrumentation and techniques of ellipsometry. 6. Applications of ellipsometry. Appendix. Author index. Subject index.

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Key concepts: Ellipsometry, Materials science, Optics, Physics, Nanotechnology, Thin film