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Reflection High-Energy Electron Diffraction Studies of Vicinal Si(111) Surfaces

Hiroki Hibino, Yukinobu Shinoda, Yoshihiro Kobayashi, Kiyomasa Sugii

Open publisher page 25 citations

Abstract

Analysis of the reflection high-energy electron diffraction (RHEED) patterns from the vicinal Si(111) surfaces misoriented to [112̄] shows that step bunching takes place on the surface, and the surface breaks up into (111) and (331) facets. A previously unreported superstructure is found on the (331) facet. From the temperature dependence of the diffraction spot positions, this superstructure and the 7×7 structure on the (111) facet are shown to cause the reconstruction-induced faceting.

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What this paper is about

Analysis of the reflection high-energy electron diffraction (RHEED) patterns from the vicinal Si(111) surfaces misoriented to [112̄] shows that step bunching takes place on the surface, and the surface breaks up into (111) and (331) facets. A previously unreported superstructure is found on the (331) facet. From the temperature dependence of the diffraction spot positions, this superstructure and the 7×7 structure on the (111) facet are shown to cause the reconstruction-induced faceting.

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OpenAlex reports 25 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

Analysis of the reflection high-energy electron diffraction (RHEED) patterns from the vicinal Si(111) surfaces misoriented to [112̄] shows that step bunching takes place on the surface, and the surface breaks up into (111) and (331) facets. A previously unreported superstructure is found on the (331) facet. From the temperature dependence of the diffraction spot positions, this superstructure and the 7×7 structure on the (111) facet are shown to cause the reconstruction-induced faceting.

Key concepts: Vicinal, Reflection high-energy electron diffraction, Superstructure, Electron diffraction, Faceting, Facet (psychology), Reflection (computer programming), Diffraction

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