1993•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access
W/C multilayers deposited on plastic films
Shoji Seki, Tsukasa Miyazaki, Motoshige Tatsumi, Koujun Yamashita
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Abstract
W/C multilayers were deposited on plastic films, which had thin thickness and light weight. TEM images showed the surface roughness of the plastic films and the boundary roughness of the multilayers. X-ray reflectivities were measured at wavelengths of 0.154 nm, 0.834 nm, and 0.3 to 0.7 nm. The boundary roughness values of the multilayers deposited on a polyimide film and a Si wafer were estimated to be 1.2 nm and 0.7 nm, respectively.