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2000•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access

Excimer laser microfabrication and micromachining

M. C. Gower

Open publisher page 28 citations

Abstract

Reports in 1982 of polymers ablated and etched by excimer laser radiation mark the founding of laser microfabrication and micromachining as technologies that in the intervening period has matured into a manufacturing process used by a diverse range of industries. This paper describes some of these industrial applications.

About this research paper

What this paper is about

Reports in 1982 of polymers ablated and etched by excimer laser radiation mark the founding of laser microfabrication and micromachining as technologies that in the intervening period has matured into a manufacturing process used by a diverse range of industries. This paper describes some of these industrial applications.

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OpenAlex reports 28 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

Reports in 1982 of polymers ablated and etched by excimer laser radiation mark the founding of laser microfabrication and micromachining as technologies that in the intervening period has matured into a manufacturing process used by a diverse range of industries. This paper describes some of these industrial applications.

Key concepts: Microfabrication, Surface micromachining, Excimer laser, Laser, Materials science, Optoelectronics, Excimer, Process (computing)

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