1987Japanese Journal of Applied PhysicsOpen access

Radial Profiles of Electron Density and Current Components at Cathode Surface in LaB6 Hollow Cathode Arc

Setsuo Suzuki, T. Asano, Osami Morimiya

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Abstract

Experimental studies on a hydrogen-fed LaB6 hollow cathode arc have been pursued. The plasma parameter in the cathode has been measured by a Langmuir probe. The radial variation in the electron density inside the cathode was calculated using the continuity and momentum equations, showing good agreement with the experimental results. The electron density at the cathode surface was estimated to be 15%–20% of that at the cathode axis. It was also found from the current balance that the arc current components at the cathode surface consist of a thermionic current which takes into account the Schottky effect, the ion current and the secondary electron current induced by ion bombardment. The ion current and the cathode surface is larger than the electron current emitted from the cathode.

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Experimental studies on a hydrogen-fed LaB6 hollow cathode arc have been pursued. The plasma parameter in the cathode has been measured by a Langmuir probe. The radial variation in the electron density inside the cathode was calculated using the continuity and momentum equations, showing good agreement with the experimental results. The electron density at the cathode surface was estimated to be 15%–20% of that at the cathode axis. It was also found from the current balance that the arc current components at the cathode surface consist of a thermionic current which takes into account the Schottky effect, the ion current and the secondary electron current induced by ion bombardment. The ion current and the cathode surface is larger than the electron current emitted from the cathode.

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Available abstract

Experimental studies on a hydrogen-fed LaB6 hollow cathode arc have been pursued. The plasma parameter in the cathode has been measured by a Langmuir probe. The radial variation in the electron density inside the cathode was calculated using the continuity and momentum equations, showing good agreement with the experimental results. The electron density at the cathode surface was estimated to be 15%–20% of that at the cathode axis. It was also found from the current balance that the arc current components at the cathode surface consist of a thermionic current which takes into account the Schottky effect, the ion current and the secondary electron current induced by ion bombardment. The ion current and the cathode surface is larger than the electron current emitted from the cathode.

Key concepts: Cathode, Hot cathode, Cathodic arc deposition, Cold cathode, Atomic physics, Thermionic emission, Electron, Langmuir probe

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