G‐SIMS: relative effectiveness of different monatomic primary ion source combinations

An analysis is made of the characteristics of monatomic primary ion sources to generate G-SIMS (gentle SIMS) spectra. In previous studies, this is resolved into the parameter beta that describes the relative intensities of ions in the series C(n)H(n+2-i) as i changes. For this, data from polystyrene are most extensive. It is found that the experimental beta values, which relate to the emitted secondary ion fragment surface plasma temperatures, are accurately described by an empirical fit involving the ratio of the sputtering yield and the mass of the primary ion. This description covers data for Ar(+), Bi(+), Cs(+), Ga(+), Mn(+) and Xe(+) monatomic primary ions with energies in the range 4 to 25 keV, placing them in a coherent framework, and permits the performance of any other monatomic primary ion to be predicted. This shows that, of all monatomic primary ions, Bi will yield the highest beta values and Mn the lowest. Since the G-SIMS spectra are ratios, a ratio involving spectra using these primary ions gives the maximum signal quality possible and these are therefore recommended for use. The previous choice of these ions for a combined G-SIMS source, based on practical considerations, is thus shown to be optimum.