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2009•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsRequires access

Determination of plasma parameters in rf glow-discharge plasma

P. Altantsog, Sh. Chadraabàl, G. Batdemberel

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Key concepts: Langmuir probe, Plasma, Electron temperature, Atomic physics, Electrode, Plasma parameters, Electron density, Materials science

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