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1998•Materials Science and Engineering BRequires access

Wet rapid thermal oxidation of silicon with a pyrogenic system

W. Lerch, G. Roters, P.C. Münzinger, R. Mader, R. Ostermeir

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Key concepts: Wet oxidation, Oxide, Isothermal process, Thermal oxidation, Wafer, Materials science, Oxidation process, Silicon

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