2002•Surface and Coatings TechnologyRequires access
Some fundamental problems in low-energy ion implantation
B. Terreault
Open publisher page 10 citations
Abstract
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B. Terreault
Abstract
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OpenAlex reports 10 citations for this work. Citation counts describe recorded attention and do not establish research quality.
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Key concepts: Ion implantation, Channelling, Materials science, Ion, Silicon, Low energy, Energy (signal processing), Fabrication