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2006•ECS TransactionsOpen access

MEMS Arrayed Scanning Probes for Soft Nanolithography

Chang Liu, Shifeng Li

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Abstract

In the past several years, much progress have been made in the area of scanning probe based, parallel soft nano lithography for patterning biomolecules directly with nano-meter resolution and high degree of registration accuracy. We report the development and demonstrations of arrayed soft nanolithography probes for dip pen nanolithography (DPN), scanning probe contact printing (SPCP), and multi-functional scanning nanolithography. The probes have been used for high throughput direct write of thoil molecules.

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In the past several years, much progress have been made in the area of scanning probe based, parallel soft nano lithography for patterning biomolecules directly with nano-meter resolution and high degree of registration accuracy. We report the development and demonstrations of arrayed soft nanolithography probes for dip pen nanolithography (DPN), scanning probe contact printing (SPCP), and multi-functional scanning nanolithography. The probes have been used for high throughput direct write of thoil molecules.

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Available abstract

In the past several years, much progress have been made in the area of scanning probe based, parallel soft nano lithography for patterning biomolecules directly with nano-meter resolution and high degree of registration accuracy. We report the development and demonstrations of arrayed soft nanolithography probes for dip pen nanolithography (DPN), scanning probe contact printing (SPCP), and multi-functional scanning nanolithography. The probes have been used for high throughput direct write of thoil molecules.

Key concepts: Nanolithography, Dip-pen nanolithography, Microelectromechanical systems, Soft lithography, Lithography, Nanotechnology, Materials science, Scanning probe microscopy

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