Diamond machining of micro-optical components and structures

Diamond machining originates from the 1950s to 1970s in the USA. This technology was originally designed for machining of metal optics at macroscopic dimensions with so far unreached tolerances. During the following decades the machine tools, the monocrystalline diamond cutting tools, the workpiece materials and the machining processes advanced to even higher precision and flexibility. For this reason also the fabrication of small functional components like micro optics at a large spectrum of geometries became technologically and economically feasible. Today, several kinds of fast tool machining and multi axis machining operations can be applied for diamond machining of micro optical components as well as diffractive optical elements. These parts can either be machined directly as single or individual component or as mold insert for mass production by plastic replication. Examples are multi lens arrays, micro mirror arrays and fiber coupling lenses. This paper will give an overview about the potentials and limits of the current diamond machining technology with respect to micro optical components.