2008•Microelectronic EngineeringRequires access

193nm interference nanolithography based on SPP

Wei Xiong, Jinglei Du, Liang Fang, Xiangang Luo, Qiling Deng, Chunlei Du

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Key concepts: Nanolithography, Interference (communication), Lithography, Surface plasmon polariton, Materials science, Interference lithography, Fabrication, Wavelength

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193nm interference nanolithography based on SPP — Research Paper | ScholarLens