Growth of nanocrystalline silicon from a matrix of amorphous silicon monoxide

Changes in the structure and phase composition of silicon monoxide in the disproportionation reaction at high temperatures with the formation of a nanocrystalline silicon phase are studied. On itsseparation from the silicon oxides, the nanosilicon powder is subjected to X-ray diffraction analysis and examined by the small-angle X-ray scattering technique. It is found that, under the optimal heat-treatment conditions of silicon monoxide, the powder obtained contains nanosilicon particles with sizes of 17–20 nm and a volume fraction of 40%.