Multilayer optics for plasma physics and synchrotron radiation

The development of multilayer optics over the past 25 years has led to unique new instrumentation for plasma diagnostics, astronomy, and synchrotron radiation research. Accurate calibration and measurement techniques for the x-ray and extreme UV regions are required for this developemnt, and for the proper interpretation of the results acquired by the instrumentation. The developement of calibration and metrology techniques based on present- day plasma and synchrotron radiation sources is leading to a better understanding of multilayer performance and their limitations.