Capturing Energy-Saving Opportunities in Air-Supply System for Cleanroom with Non-Unidirectional Airflow

In order to improve design method and optimize control strategy used in non-unidirectional airflow cleanroom, the influence of airflow organization and supply air volume on characterization of mini-environments in a non-unidirectional cleanroom was studied in the paper. A series of investigations were conducted on a cleanroom experimental platform with different airflow organization modes and supply air volume variation by electronic frequency conversion (35 to50Hz, 5Hz interval) on air-supply fan unit. The characterization such as cleanliness , pressure difference between clean zone and outdoor were measured during these experiments. It is shown that radiation air-supply airflow organization can offer higher cleanliness when compared with traditional ceiling-supply and wall-return airflow for non-unidirectional airflow cleanroom without increase power consumption. Taking variable electronic frequency on air-supply fan unit is efficient measure for energy-saving in cleanroom operation.