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1984•Journal of Crystal GrowthRequires access

Silicon doping of GaAs and AlxGa1−xAs using disilane in metalorganic chemical vapor deposition

T. F. Kuech, E. Veuhoff, B.S. Meyerson

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Key concepts: Disilane, Silane, Chemical vapor deposition, Chemistry, Doping, Silicon, Epitaxy, Inorganic chemistry

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