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High-Sensitivity Total Reflection X-Ray Fluorescence Spectroscopy of Silicon Wafers Using Synchrotron Radiation

S. S. Laderman, A. Fischer-Colbrie, Ayako Shimazaki, Kunihiro Miyazaki, S. Brennan, Noritaka Takakura, P. Pianetta, Jeffrey B. Kortright

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Key concepts: Chemistry, Synchrotron radiation, X-ray fluorescence, Synchrotron, Wafer, Silicon, Total internal reflection, Fluorescence

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