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2005•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsRequires access

Three-dimensional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition

Reo Kometani, Takayuki Hoshino, Kazuhiro Kanda, Yuichi Haruyama, Takashi Kaito, Jun‐ichi Fujita, Masahiko Ishida, Yukinori Ochiai, Shinji Matsui

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Key concepts: Nano-, Focused ion beam, Materials science, Chemical vapor deposition, Nanotechnology, Nanoscopic scale, Deposition (geology), Ion beam

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