Subwavelength binary blazed grating optical switch based on TiO 2 -on-SiO 2

A high-perform and compact subwavelength binary blazed grating optical switch was designed based on TiO2-on-SiO2. By appropriate choice of grating parameters including thicknesses, periods, height, and fill factor, to optimize the diffraction properties, a relative high diffraction efficiency and large diffraction angle was obtained simultaneously. The diffraction efficiency of the first switching channel is about 80% with a 45° diffraction angle, and the diffraction efficiency of the second channel is around 90% with a 30° diffraction angle. The device layout is simple, feasible, one-step etch, and compatible with standard CMOS technology processing.