1998•IBM Journal of Research and DevelopmentRequires access

Applications of electrochemical microfabrication: An introduction

Madhav Datta

Open publisher page 39 citations

Abstract

Global competitive pressures and the ever-increasing demand for faster, smaller, less expensive electronic systems have produced fundamental changes in processing technologies. A variety of microelectronic components are manufactured with high-yield, cost-effective electrochemical processing. Electrochemical microfabrication uses electrochemical methods to create thin- and thick-film-patterned microstructures.

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What this paper is about

Global competitive pressures and the ever-increasing demand for faster, smaller, less expensive electronic systems have produced fundamental changes in processing technologies. A variety of microelectronic components are manufactured with high-yield, cost-effective electrochemical processing. Electrochemical microfabrication uses electrochemical methods to create thin- and thick-film-patterned microstructures.

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OpenAlex reports 39 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

Global competitive pressures and the ever-increasing demand for faster, smaller, less expensive electronic systems have produced fundamental changes in processing technologies. A variety of microelectronic components are manufactured with high-yield, cost-effective electrochemical processing. Electrochemical microfabrication uses electrochemical methods to create thin- and thick-film-patterned microstructures.

Key concepts: Microelectronics, Microfabrication, Nanotechnology, Electrochemistry, Materials science, Yield (engineering), Process engineering, Engineering

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