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2004•Surface and Coatings TechnologyRequires access

Properties of TiAlN coatings synthesized by closed-field unbalanced magnetron sputtering

GwangSeok Kim, Sang-Yul Lee, Junhee Hahn

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Key concepts: Materials science, Sputter deposition, Nanoindentation, Cavity magnetron, Microstructure, Thin film, Grain size, Metallurgy

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