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Titanium containing DLC coatings from a PACVD process using titanium (IV) isopropylate as a precursor

Matthias Töwe, Carsten Benndorf

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Key concepts: X-ray photoelectron spectroscopy, Titanium, Analytical Chemistry (journal), Materials science, USB, Thin film, Chemical engineering, Chemistry

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Titanium containing DLC coatings from a PACVD process using titanium (IV) isopropylate as a precursor — Research Paper | ScholarLens