2008•Sensors and Actuators A PhysicalRequires access

Getter free vacuum packaging for MEMS

Zhiyin Gan, Dexiu Huang, Xuefang Wang, Dong Liang Lin, Sheng Liu

Open publisher page 36 citations

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Key concepts: Getter, Vacuum packing, Vacuum level, Ultra-high vacuum, Microelectromechanical systems, Materials science, Reliability (semiconductor), Work (physics)