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1985•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsRequires access

The use of four-point probe sheet resistance measurements for characterizing low dose ion implantation

Alan K. Smith, David S. Perloff, Robert Alan Edwards, Rob Kleppinger, Michael D. Rigik

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Key concepts: Sheet resistance, Silicon, Impurity, Materials science, Spreading resistance profiling, Ion implantation, Ion, Argon

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