1988•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access
Integrated Planar Microlens And Its Applications
Mariko Oikawa, 英二 奥田, Kenjiro Hamanaka, Hiroyuki Nemoto
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Abstract
The paper describes a monolithically integrated planar microlens array and its applications. An ion exchange technology is applied to realize the microlens array with diameters of 10 - 1000 pm and N.A. of 0.25. Applications to optical fiber communications, combinations with CCD arrays and optical computing are demonstrated.