Inductance deep-level transient spectroscopy for determining temperature-dependent resistance and capacitance of Schottky diodes

A modification of the deep-level transient spectroscopy (DLTS) is presented to determine the series resistance and capacitance of a semiconductor Schottky diode in a more accurately manner than it is usually done. The actual techniques are complicated and difficult. In a DLTS sample the resistance and capacitance are in series, but when measured by a capacitance meter they appear to be parallel, which causes a significant error in all DLTS parameters. We propose an easier technique which yields more reliable values, by using an inductor in series. We show theoretically and experimentally that the correct resistance and capacitance can simply be obtained if an inductor is placed in series with the sample. This have been validated experimentally.