2015Optics ExpressOpen access

Achromatic and high-resolution full-field X-ray microscopy based on total-reflection mirrors

Satoshi Matsuyama, Y. Emi, H. Kino, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Open full text 20 citations

Abstract

We developed an achromatic and high-resolution full-field X-ray microscope based on advanced Kirkpatrick-Baez mirror optics that comprises two pairs of elliptical mirrors and hyperbolic mirrors utilizing the total reflection of X-rays. Performance tests to investigate the spatial resolution and chromatic aberration were performed at SPring-8. The microscope clearly resolved the pattern with ~100-nm feature size. Imaging the pattern by changing the X-ray energy revealed achromatism in the wide energy range of 8-11 keV.

About this research paper

What this paper is about

We developed an achromatic and high-resolution full-field X-ray microscope based on advanced Kirkpatrick-Baez mirror optics that comprises two pairs of elliptical mirrors and hyperbolic mirrors utilizing the total reflection of X-rays. Performance tests to investigate the spatial resolution and chromatic aberration were performed at SPring-8. The microscope clearly resolved the pattern with ~100-nm feature size. Imaging the pattern by changing the X-ray energy revealed achromatism in the wide energy range of 8-11 keV.

Why it matters

OpenAlex reports 20 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

We developed an achromatic and high-resolution full-field X-ray microscope based on advanced Kirkpatrick-Baez mirror optics that comprises two pairs of elliptical mirrors and hyperbolic mirrors utilizing the total reflection of X-rays. Performance tests to investigate the spatial resolution and chromatic aberration were performed at SPring-8. The microscope clearly resolved the pattern with ~100-nm feature size. Imaging the pattern by changing the X-ray energy revealed achromatism in the wide energy range of 8-11 keV.

Key concepts: Achromatic lens, Optics, Chromatic aberration, Resolution (logic), Microscope, Image resolution, Reflection (computer programming), Microscopy

Related papers

Back to paper searchBrowse research topicsOriginal source
Achromatic and high-resolution full-field X-ray microscopy based on total-reflection mirrors — Research Paper | ScholarLens