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Effect of discharge conditions on characteristics of hydrogenated amorphous silicon deposited by DC glow discharge decomposition

Jin Hyuk Jang, Choochon Lee

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Key concepts: Glow discharge, Amorphous silicon, Materials science, Decomposition, Silicon, Amorphous solid, Electrode, Analytical Chemistry (journal)

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Effect of discharge conditions on characteristics of hydrogenated amorphous silicon deposited by DC glow discharge decomposition — Research Paper | ScholarLens